Thin Film Processes

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Thin Film Processes

Thin Film Processes

Name: Thin Film Processes
ISBN: 9780127282503

John L. Vossen (Auth.)

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Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process

درجه (قاطیغوری(:

Engineering

کال:

1978

خپرندویه اداره:

Academic Press

ژبه:

english

صفحه:

553

ISBN 10:

0127282505